Invention Grant
- Patent Title: Exposure machine and exposure method
-
Application No.: US17437752Application Date: 2021-03-10
-
Publication No.: US11852976B2Publication Date: 2023-12-26
- Inventor: Bin Zou
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Ladas & Parry LLP
- Priority: CN 2010176633.3 2020.03.13
- International Application: PCT/CN2021/080070 2021.03.10
- International Announcement: WO2021/180140A 2021.09.16
- Date entered country: 2021-09-09
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F1/82 ; G03F7/00

Abstract:
An exposure machine and an exposure method are provided in some embodiments of the present disclosure. The exposure machine includes: a detection module, configured to detect whether there are attachments on the surface of a reticle; a cleaning device, configured to clean the attachments on the surface of the reticle; and an exposure module, configured to expose the reticle having no attachments detected.
Public/Granted literature
- US20230176483A1 EXPOSURE MACHINE AND EXPOSURE METHOD Public/Granted day:2023-06-08
Information query
IPC分类: