Invention Grant
- Patent Title: Reticle pod with spoiler structure
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Application No.: US16562513Application Date: 2019-09-06
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Publication No.: US11854847B2Publication Date: 2023-12-26
- Inventor: Chia-Ho Chuang , Hsin-Min Hsueh , Shu-Hung Lin , Ming-Chien Chiu
- Applicant: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Applicant Address: TW New Taipei
- Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Current Assignee: GUDENG PRECISION INDUSTRIAL CO., LTD.
- Current Assignee Address: TW New Taipei
- Priority: TW 8113242 2019.04.16
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
A reticle pod with a spoiler structure includes a body and a cover. A reticle allocation area is centrally disposed at the body. The cover covers the body. A peripheral area of the cover and a peripheral area of the body are fitted together by a protruding portion and a dented portion. The dented portion and the protruding portion jointly form a spoiler structure surrounding the reticle allocation area. The spoiler structure includes a spoiler passage between the dented portion and the protruding portion. The body has at least one sidewall corresponding in position to the spoiler passage to form a particle-collecting space. Particles carried by external air current which enters the spoiler passage end up in the particle-collecting space and thus are denied entry into the reticle allocation area.
Public/Granted literature
- US20200335371A1 RETICLE POD WITH SPOILER STRUCTURE Public/Granted day:2020-10-22
Information query
IPC分类: