Phase-modified quasi-non-diffracting laser beams for high angle laser processing of transparent workpieces
Abstract:
A method for processing a transparent workpiece that includes directing a laser beam into the transparent workpiece. A portion of the laser beam directed into the transparent workpiece comprises a laser beam focal line and generates an induced absorption to produce a defect within the transparent workpiece. The laser beam focal line includes a wavelength λ, a spot size wo, a Rayleigh range ZR that is greater than





F
D





π


w
o
2


λ

,





where FD is a value of 10 or greater, and an internal focal line angle of greater than 10°. The laser beam focal line further comprises a circular angular spectrum within the transparent workpiece and a plurality of rays. Each individual ray of the plurality of rays has a same phase, ϕ, when converging to form the circular angular spectrum within the transparent workpiece.
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