Invention Grant
- Patent Title: High-strength zirconia-alumina composite ceramic substrate applied to semiconductor device and manufacturing method thereof
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Application No.: US16928035Application Date: 2020-07-14
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Publication No.: US11858850B2Publication Date: 2024-01-02
- Inventor: Chih-Hung Chu , Jui-Kai Wang
- Applicant: LEATEC FINE CERAMICS CO., LTD.
- Applicant Address: TW Taoyuan
- Assignee: LEATEC FINE CERAMICS CO., LTD.
- Current Assignee: LEATEC FINE CERAMICS CO., LTD.
- Current Assignee Address: TW Taoyuan
- Agency: BACON & THOMAS, PLLC
- Main IPC: C04B35/119
- IPC: C04B35/119 ; C04B35/626 ; C04B35/634 ; C04B35/64 ; H01L21/48 ; H01L23/15

Abstract:
A high-strength zirconia-alumina composite ceramic substrate suitable for semiconductor devices has been invented. It is manufactured by a procedure starting with mixing powder formula of alumina, zirconia, and a self-made synthetic additive for ball milling in an organic solvent at room temperature. The resulting mixture is homogenously dispersed and is then subjected to the steps of slurry preparation, degassing, green embryo forming, punching, calculation, and sintering to yield the final composite ceramic substrate with an excellent mechanical property of three-point bending strength>600 MPa and superior thermoelectric properties of thermal conductivity>26 W/mK, insulation resistance>1014 Ω·cm and surface leakage current (150° C.)
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