Invention Grant
- Patent Title: Controlling plating electrolyte concentration on an electrochemical plating apparatus
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Application No.: US17809124Application Date: 2022-06-27
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Publication No.: US11859300B2Publication Date: 2024-01-02
- Inventor: Zhian He , Shantinath Ghongadi , Quan Ma , Hyungjun Hur , Cian Sweeney , Quang Nguyen , Rezaul Karim , Jingbin Feng
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D17/00
- IPC: C25D17/00 ; C25D17/10 ; C25D3/38 ; C25D21/14 ; C25D21/18 ; H01L21/288

Abstract:
Methods and electroplating systems for controlling plating electrolyte concentration on an electrochemical plating apparatus for substrates are disclosed. A method involves: (a) providing an electroplating solution to an electroplating system; (b) electroplating the metal onto the substrate while the substrate is held in a cathode chamber of an electroplating cell of electroplating system; (c) supplying the make-up solution to the electroplating system via a make-up solution inlet; and (d) supplying the secondary electroplating solution to the electroplating system via a secondary electroplating solution inlet. The secondary electroplating solution includes some or all components of the electroplating solution. At least one component of the secondary electroplating solution has a concentration that significantly deviates from its target concentration.
Public/Granted literature
- US20220333267A1 CONTROLLING PLATING ELECTROLYTE CONCENTRATION ON AN ELECTROCHEMICAL PLATING APPARATUS Public/Granted day:2022-10-20
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