Invention Grant
- Patent Title: Photonic integrated circuit platform and optical phase array device using the same
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Application No.: US17023631Application Date: 2020-09-17
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Publication No.: US11860410B2Publication Date: 2024-01-02
- Inventor: Dongjae Shin , Dongsik Shim , Eunkyung Lee , Changbum Lee , Bongyong Jang
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR 20200060618 2020.05.20
- Main IPC: G02B6/12
- IPC: G02B6/12 ; G02B6/136 ; G02B6/125 ; G02B6/293

Abstract:
A photonic integrated circuit platform includes a substrate, a first oxide layer disposed on the substrate and including an insulating transparent oxide, and a first optical element layer disposed on the first oxide layer and including a semiconductor material. The photonic integrated circuit platform further includes a second optical element layer disposed on the first optical element layer and including an insulating material different from the insulating transparent oxide of the first oxide layer, the second optical element layer further including a compound semiconductor material different from the semiconductor material of the first optical element layer, a second oxide layer disposed on the second optical element layer and including an insulating transparent oxide, and a plurality of optical elements formed by patterning the first optical element layer or the second optical element layer.
Public/Granted literature
- US20210364695A1 PHOTONIC INTEGRATED CIRCUIT PLATFORM AND OPTICAL PHASE ARRAY DEVICE USING THE SAME Public/Granted day:2021-11-25
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