Invention Grant
- Patent Title: Liquid treatment apparatus and method of adjusting temperature of treatment liquid
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Application No.: US18098572Application Date: 2023-01-18
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Publication No.: US11860542B2Publication Date: 2024-01-02
- Inventor: Takashi Yamauchi , Daiki Shibata , Kohei Kawakami
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer; Tanya E. Harkins
- Priority: JP 19224551 2019.12.12
- Main IPC: G03F7/16
- IPC: G03F7/16 ; H01L21/67 ; B05C11/10 ; B05B9/00 ; H01L21/687 ; H01L21/027

Abstract:
A liquid treatment apparatus includes: a substrate holder for holding a substrate; a discharge nozzle for discharging a treatment liquid onto the substrate; a liquid supply pipe for supplying the treatment liquid from a treatment liquid storage source to the discharge nozzle; a gas pipe that encompasses the liquid supply pipe and through which an inert gas for adjusting the temperature of the treatment liquid flows in a space between the gas pipe and the liquid supply pipe; a processing container in which the substrate holder, the discharge nozzle, the liquid supply pipe, and the gas pipe are provided; and an atmosphere gas supply part for supplying an atmosphere gas into the processing container. The gas pipe is provided so that an extension portion between an upstream end inside the processing container and an encompassing portion is folded back inside the processing container in a plan view.
Public/Granted literature
- US20230152703A1 LIQUID TREATMENT APPARATUS AND METHOD OF ADJUSTING TEMPERATURE OF TREATMENT LIQUID Public/Granted day:2023-05-18
Information query
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