Invention Grant
- Patent Title: Crane monitoring system and method
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Application No.: US17447189Application Date: 2021-09-08
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Publication No.: US11862494B2Publication Date: 2024-01-02
- Inventor: Wei Feng
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Syncoda LLC
- Agent Feng Ma
- Priority: CN 2010655230.7 2020.07.09
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67 ; G01S17/08 ; G01S7/4861 ; B66C13/46 ; B66C13/18 ; B66C19/00

Abstract:
A crane monitoring system includes a first detection apparatus, a processing apparatus and a second detection apparatus. The first detection apparatus is configured to detect a position of a crane, to send a first detection signal when the crane is located above a Front Opening Unified Pod (FOUP) load port of a semiconductor processing device, and to send a second detection signal when the crane leaves a space above the FOUP load port. The processing apparatus is configured to generate a start control signal responsive to receiving the first detection signal, and to generate a stop control signal responsive to receiving the second detection signal. The second detection apparatus is configured to start a detection of whether there is a foreign matter between the crane and the FOUP load port after receiving the start control signal, and to stop the detection after receiving the stop control signal.
Public/Granted literature
- US20220013389A1 CRANE MONITORING SYSTEM AND METHOD Public/Granted day:2022-01-13
Information query
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