Invention Grant
- Patent Title: Method for producing a 3D semiconductor device and structure with memory cells and multiple metal layers
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Application No.: US18106757Application Date: 2023-02-07
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Publication No.: US11862503B2Publication Date: 2024-01-02
- Inventor: Zvi Or-Bach , Brian Cronquist , Deepak C. Sekar
- Applicant: Monolithic 3D Inc.
- Applicant Address: US OR Klamath Falls
- Assignee: Monolithic 3D Inc.
- Current Assignee: Monolithic 3D Inc.
- Current Assignee Address: US OR Klamath Falls
- Agency: Patent PC PowerPatent
- Agent Bao Tran
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/74 ; H01L21/762 ; H01L21/768 ; H01L21/822 ; H01L21/8238 ; H01L21/84 ; H01L23/48 ; H01L23/525 ; H01L27/02 ; H01L27/06 ; H01L27/092 ; H01L27/10 ; H01L27/105 ; H01L27/118 ; H01L27/12 ; H01L29/423 ; H01L29/66 ; H01L29/78 ; H01L29/788 ; H01L29/792 ; G11C8/16 ; H10B10/00 ; H10B12/00 ; H10B20/00 ; H10B41/20 ; H10B41/40 ; H10B41/41 ; H10B43/20 ; H10B43/40 ; H01L23/367 ; H01L25/065 ; H01L25/00 ; H01L23/00 ; H10B20/20

Abstract:
A method for producing a 3D semiconductor device including: providing a first level including a first single crystal layer; forming a first metal layer on top of first level; forming a second metal layer on top of the first metal layer; forming at least one second level above the second metal layer; performing a first lithography step on the second level; forming a third level on top of the second level; performing a second lithography step on the third level; perform processing steps to form first memory cells within the second level and second memory cells within the third level, where first memory cells include at least one second transistor, and the second memory cells include at least one third transistor; and deposit a gate electrode for the second and the third transistors simultaneously.
Public/Granted literature
- US20230187256A1 METHODS FOR PRODUCING A 3D SEMICONDUCTOR DEVICE AND STRUCTURE WITH MEMORY CELLS Public/Granted day:2023-06-15
Information query
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