Invention Grant
- Patent Title: Trench isolation structure for image sensors
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Application No.: US17150014Application Date: 2021-01-15
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Publication No.: US11862654B2Publication Date: 2024-01-02
- Inventor: Cheng Yu Huang , Chun-Hao Chuang , Keng-Yu Chou , Wei-Chieh Chiang , Chin-Chia Kuo , Wen-Hau Wu , Hua-Mao Chen , Chih-Kung Chang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
Various embodiments of the present disclosure are directed towards an image sensor, and a method for forming the image sensor, in which an inter-pixel trench isolation structure is defined by a low-transmission layer. In some embodiments, the image sensor comprises an array of pixels and the inter-pixel trench isolation structure. The array of pixels is on a substrate, and the pixels of the array comprise individual photodetectors in the substrate. The inter-pixel trench isolation structure is in the substrate. Further, the inter-pixel trench isolation structure extends along boundaries of the pixels, and individually surrounds the photodetectors, to separate the photodetectors from each other. The inter-pixel trench isolation structure is defined by a low-transmission layer with low transmission for incident radiation, such that the inter-pixel trench isolation structure has low transmission for incident radiation. The low-transmission layer may, for example, be or comprise metal and/or some other suitable material(s).
Public/Granted literature
- US20220231066A1 TRENCH ISOLATION STRUCTURE FOR IMAGE SENSORS Public/Granted day:2022-07-21
Information query
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