Invention Grant
- Patent Title: Structures, acoustic wave resonators, devices and systems to sense a target variable
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Application No.: US17380011Application Date: 2021-07-20
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Publication No.: US11863153B2Publication Date: 2024-01-02
- Inventor: Dariusz Burak , Kevin J. Grannen , Jack Lenell
- Applicant: QXONIX Inc.
- Applicant Address: US CA Irvine
- Assignee: Qxonix Inc.
- Current Assignee: Qxonix Inc.
- Current Assignee Address: US CA Irvine
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/205 ; H03H9/13 ; H03H9/17 ; H03H9/56 ; H03H3/02 ; H03H9/54
Abstract:
Techniques for improving Bulk Acoustic Wave (BAW) resonator structures are disclosed, including fluidic systems, oscillators and systems that may include such devices. A bulk acoustic wave (BAW) resonator may comprise a substrate and a first layer of piezoelectric material. The bulk acoustic wave (BAW) resonator may comprise a top electrode. A sensing region may be acoustically coupled with the top electrode of the bulk acoustic wave (BAW) resonator.
Public/Granted literature
- US20210351759A1 STRUCTURES, ACOUSTIC WAVE RESONATORS, DEVICES AND SYSTEMS TO SENSE A TARGET VARIABLE Public/Granted day:2021-11-11
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