Invention Grant
- Patent Title: Acoustic wave device including multi-layer interdigital transducer electrodes
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Application No.: US16545037Application Date: 2019-08-20
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Publication No.: US11863156B2Publication Date: 2024-01-02
- Inventor: Tomohiro Iwasaki , Hiroyuki Nakamura , Toru Yamaji , Mitsunori Miyanari , Masahiro Yasumi , Shoji Okamoto
- Applicant: SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Applicant Address: JP Kadoma
- Assignee: SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Current Assignee: SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Current Assignee Address: JP Kadoma
- Agency: Lando & Anastasi, LLP
- Priority: JP 13027414 2013.02.15 JP 13047493 2013.03.11 JP 13187919 2013.09.11
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/10 ; H03H9/13 ; H03H3/08

Abstract:
A surface acoustic wave device comprises a substrate and an interdigital transducer (IDT) electrode disposed on the substrate. The IDT electrode includes a lower electrode layer having a lower surface in contact with an upper surface of the substrate and an upper electrode layer having a lower surface defining a base in contact with an upper surface of the lower electrode layer. Side surfaces of the lower electrode layer are substantially perpendicular to the upper surface of the substrate. Side surfaces of the upper electrode layer are disposed at an acute angle relative to the upper surface of the substrate.
Public/Granted literature
- US2214722A Aircraft structure Public/Granted day:1940-09-10
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