Invention Grant
- Patent Title: Bonded semiconductor devices having processor and NAND flash memory and methods for forming the same
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Application No.: US17228496Application Date: 2021-04-12
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Publication No.: US11864367B2Publication Date: 2024-01-02
- Inventor: Weihua Cheng , Jun Liu
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: BAYES PLLC
- Priority: WO TCN2019085237 2019.04.30 WO TCN2019097442 2019.09.11
- The original application number of the division: US16669445 2019.10.30
- Main IPC: H10B10/00
- IPC: H10B10/00 ; H01L21/02 ; H01L21/20 ; H01L21/822 ; H01L25/065 ; G11C14/00 ; G11C16/04 ; H01L21/50 ; H01L23/00 ; H01L25/18 ; H01L25/00 ; H01L27/06 ; H01L29/04 ; H01L29/16 ; H01L21/76 ; H10B12/00 ; H10B41/27 ; H10B41/40 ; H10B43/20 ; H10B43/27 ; H10B43/35 ; H10B43/40

Abstract:
First semiconductor structures are formed on a first wafer. At least one of the first semiconductor structures includes a processor, an array of SRAM cells, and a first bonding layer including first bonding contacts. Second semiconductor structures are formed on a second wafer. At least one of the second semiconductor structures includes an array of NAND memory cells and a second bonding layer including second bonding contacts. The first wafer and the second wafer are bonded in a face-to-face manner, such that the at least one of the first semiconductor structures is bonded to the at least one of the second semiconductor structures. The first bonding contacts of the first semiconductor structure are in contact with the second bonding contacts of the second semiconductor structure at a bonding interface. The bonded first and second wafers are diced into dies. At least one of the dies includes the bonded first and second semiconductor structures.
Public/Granted literature
- US20210233916A1 BONDED SEMICONDUCTOR DEVICES HAVING PROCESSOR AND NAND FLASH MEMORY AND METHODS FOR FORMING THE SAME Public/Granted day:2021-07-29
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