Invention Grant
- Patent Title: Method of cleaning stage in plasma processing apparatus, and the plasma processing apparatus
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Application No.: US17103918Application Date: 2020-11-24
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Publication No.: US11865591B2Publication Date: 2024-01-09
- Inventor: Takamitsu Takayama , Junichi Sasaki
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: XSENSUS LLP
- Priority: JP 19216210 2019.11.29
- Main IPC: H01J37/32
- IPC: H01J37/32 ; B08B7/00

Abstract:
A method of cleaning a stage in a plasma processing apparatus including the stage on which a substrate is placed, a lifting mechanism configured to raise and lower the substrate with respect to the stage, and a high-frequency power supply connected to the stage, includes: separating the stage and the substrate from each other using the lifting mechanism; and after the separating the stage and the substrate from each other, removing a deposit deposited on the stage with plasma generated by supplying a high-frequency power from the high-frequency power supply to the stage. In the separating the stage and the substrate from each other, a separation distance between the stage and the substrate is set such that a combined impedance formed around an outer peripheral portion of the stage is lower than a combined impedance formed immediately above a central portion of the stage.
Public/Granted literature
- US20210162468A1 METHOD OF CLEANING STAGE IN PLASMA PROCESSING APPARATUS, AND THE PLASMA PROCESSING APPARATUS Public/Granted day:2021-06-03
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