Invention Grant
- Patent Title: Thermo-physical property measurement instrument and thermo-physical property measurement method
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Application No.: US17596800Application Date: 2019-12-04
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Publication No.: US11867567B2Publication Date: 2024-01-09
- Inventor: Yohei Kakefuda , Susumu Kawakami , Tetsuya Baba , Takao Mori
- Applicant: NETZSCH Japan K.K. , NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Applicant Address: JP Yokohama
- Assignee: NETZSCH Japan K.K.,NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Current Assignee: NETZSCH Japan K.K.,NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Current Assignee Address: JP Yokohama; JP Tsukuba
- Agency: Whitmyer IP Group LLC
- Priority: JP 19114439 2019.06.20
- International Application: PCT/JP2019/047422 2019.12.04
- International Announcement: WO2020/255447A 2020.12.24
- Date entered country: 2021-12-17
- Main IPC: G01K11/12
- IPC: G01K11/12 ; G01N25/18

Abstract:
In a thermo-physical property measurement instrument, a light shield that shields from light except for an aperture is provided facing the front surface of a sample thin film of a sample. Heating light of repeated pulse that is output from a heating laser irradiates the sample thin film through the light shield. Temperature measurement light of continuous light that is output from a temperature measurement laser is applied to a measurement position a predetermined distance away from a heating light irradiation position on the sample thin film. A photodetector detects reflected light of the temperature measurement light off the sample thin film, and a computer acquires a thermo-reflectance signal that was digitally converted by an AD converter. The computer calculates a thermo-physical property value in the in-plane direction of the sample thin film of the sample on the basis of the acquired thermo-reflectance signal.
Public/Granted literature
- US20220316959A1 Thermophysical Property Value Measurement Device And Thermophysical Property Value Measurement Method Public/Granted day:2022-10-06
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