Invention Grant
- Patent Title: Embedded ferroelectric memory cell
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Application No.: US17866946Application Date: 2022-07-18
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Publication No.: US11869564B2Publication Date: 2024-01-09
- Inventor: Tzu-Yu Chen , Kuo-Chi Tu , Wen-Ting Chu , Yong-Shiuan Tsair
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- The original application number of the division: US16267668 2019.02.05
- Main IPC: G11C11/22
- IPC: G11C11/22 ; H01L29/51 ; H10B51/30 ; H10B51/40

Abstract:
The present disclosure relates to an integrated chip structure. The integrated chip structure includes a first source/drain region and a second source/drain region disposed within a substrate. A select gate is disposed over the substrate between the first source/drain region and the second source/drain region. A ferroelectric random-access memory (FeRAM) device is disposed over the substrate between the select gate and the first source/drain region. A first sidewall spacer, including one or more dielectric materials, is arranged laterally between the select gate and the FeRAM device. An inter-level dielectric (ILD) structure laterally surrounds the FeRAM device and the select gate and vertically overlies a top surface of the first sidewall spacer.
Public/Granted literature
- US20220351769A1 EMBEDDED FERROELECTRIC MEMORY CELL Public/Granted day:2022-11-03
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