Invention Grant
- Patent Title: X-ray source with rotating liquid-metal target
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Application No.: US17604922Application Date: 2020-04-26
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Publication No.: US11869742B2Publication Date: 2024-01-09
- Inventor: Aleksandr Yurievich Vinokhodov , Vladimir Vitalievich Ivanov , Konstantin Nikolaevich Koshelev , Mikhail Sergeyevich Krivokorytov , Vladimir Mikhailovich Krivtsun , Aleksandr Andreevich Lash , Vyacheslav Valerievich Medvedev , Yury Viktorovich Sidelnikov , Oleg Feliksovich Yakushev , Denis Alexandrovich Glushkov , Samir Ellwi , Oleg Borisovich Khristoforov
- Applicant: EUV LABS, LTD
- Applicant Address: RU Moscow
- Assignee: ISTEQ B.V.,ISTEQ GROUP HOLDING B.V.
- Current Assignee: ISTEQ B.V.,ISTEQ GROUP HOLDING B.V.
- Current Assignee Address: NL Eindhoven; NL Eindhoven
- Agent Nadya Reingand
- Priority: RU 2019113052 2019.04.26 RU 2019113053 2019.04.26 RU 2020103063 2020.01.25
- International Application: PCT/RU2020/050083 2020.04.26
- International Announcement: WO2020/218952A 2020.10.29
- Date entered country: 2021-10-19
- Main IPC: H01J35/10
- IPC: H01J35/10 ; H01J35/18 ; H01J35/08

Abstract:
An X-ray beam is generated in an interaction zone of an electron beam and a target, the zone being an annular layer of a molten fusible metal in an annular channel of a rotating anode assembly. The channel has a surface profile which prevents slopping of the molten metal in the radial direction and in both directions along the rotation axis. The liquid-metal target forms a circular cylindrical surface due to the centrifugal force acting thereupon. The linear velocity of the target is preferably higher than 80 m/s; in a vacuum chamber, a changeable membrane made of carbon nanotubes is installed in the X-ray beam path and a protective screen with apertures for electron beam entry and X-ray beam exit is arranged around the interaction zone. The technical result consists in an X-ray source with increased power, brightness, lifetime and ease of use.
Public/Granted literature
- US20220310351A1 X-RAY SOURCE WITH ROTATING LIQUID-METAL TARGET Public/Granted day:2022-09-29
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