Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US17502406Application Date: 2021-10-15
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Publication No.: US11869753B2Publication Date: 2024-01-09
- Inventor: Takahiro Senda , Yuzo Uemura , Yusei Kuwabara , Tomoya Ujiie
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP 20176181 2020.10.20
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A plasma processing apparatus includes a processing chamber; a placing table disposed in the processing chamber to place a substrate thereon; an upper electrode facing the placing table; a member configured to adjust a temperature of the upper electrode; a first sensor provided within the member configured to adjust the temperature of the upper electrode, and configured to measure the temperature of the upper electrode; and a first sheet member, disposed between the upper electrode and the first sensor, having a relative dielectric constant of 2.4 or higher at a frequency of 1 MHz.
Public/Granted literature
- US20220122814A1 PLASMA PROCESSING APPARATUS Public/Granted day:2022-04-21
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