Invention Grant
- Patent Title: Manufacturing method of an element of an electronic device having improved reliability, and related element, electronic device and electronic apparatus
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Application No.: US17458102Application Date: 2021-08-26
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Publication No.: US11869771B2Publication Date: 2024-01-09
- Inventor: Simone Rascuna′ , Mario Giuseppe Saggio
- Applicant: STMICROELECTRONICS S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT 2020000021058 2020.09.04
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/04 ; H01L29/16 ; H01L29/66

Abstract:
A manufacturing method of an anchorage element of a passivation layer, comprising: forming, in a semiconductor body made of SiC and at a distance from a top surface of the semiconductor body, a first implanted region having, along a first axis, a first maximum dimension; forming, in the semiconductor body, a second implanted region, which is superimposed to the first implanted region and has, along the first axis, a second maximum dimension smaller than the first maximum dimension; carrying out a process of thermal oxidation of the first implanted region and second implanted region to form an oxidized region; removing said oxidized region to form a cavity; and forming, on the top surface, the passivation layer protruding into the cavity to form said anchorage element fixing the passivation layer to the semiconductor body.
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