Invention Grant
- Patent Title: Optimizating semiconductor binning by feed-forward process adjustment
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Application No.: US17244084Application Date: 2021-04-29
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Publication No.: US11869783B2Publication Date: 2024-01-09
- Inventor: Benjamin D. Briggs , Lawrence A. Clevenger , Nicholas A. Lanzillo , Michael Rizzolo , Theodorus E. Standaert , James Stathis
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Joseph P. Curcuru
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G06N5/04 ; G06N20/00

Abstract:
One or more processors determine a predicted sorting bin of a semiconductor device, based on measurement and test data performed on the semiconductor device subsequent to a current metallization layer. A current predicted sorting bin and a target sorting bin are determined by a machine learning model for the semiconductor device; the target bin include higher performance semiconductor devices than the predicted sorting bin. The model determines a performance level improvement attainable by adjustments made to process parameters of subsequent metallization layers of the semiconductor device. Adjustments to process parameters are generated, based on measurement and test data of the current metallization layer of semiconductor device, and the adjustment outputs for the process parameters of the subsequent metallization layers of the semiconductor device are made available to the one or more subsequent metallization layer processes by a feed-forward mechanism.
Public/Granted literature
- US20210249288A1 OPTIMIZATING SEMICONDUCTOR BINNING BY FEED-FORWARD PROCESS ADJUSTMENT Public/Granted day:2021-08-12
Information query
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