Invention Grant
- Patent Title: Chip stack packaging structure and chip stack packaging method
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Application No.: US17634081Application Date: 2021-08-05
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Publication No.: US11869872B2Publication Date: 2024-01-09
- Inventor: Yao Wang , Yunzhi Ling , Yinhua Cui , Chuan Hu , Zibai Li , Wei Zhao , Zhitao Chen
- Applicant: Institute of Semiconductors, Guangdong Academy of Sciences
- Applicant Address: CN Guangzhou
- Assignee: Institute of Semiconductors, Guangdong Academy of Sciences
- Current Assignee: Institute of Semiconductors, Guangdong Academy of Sciences
- Current Assignee Address: CN Guangzhou
- Agency: Gardner, Linn, Burkhart & Ondersma, LLP
- International Application: PCT/CN2021/111018 2021.08.05
- International Announcement: WO2023/010457A 2023.02.09
- Date entered country: 2022-02-09
- Main IPC: H01L23/02
- IPC: H01L23/02 ; H01L25/065 ; H01L21/768 ; H01L23/498 ; H01L23/00 ; H01L25/00

Abstract:
A chip stack packaging structure and method includes: a base chip layer, including a base chip with pins on the front surface; at least one stacked chip layer, which is formed on the base chip layer, has an inter-chip insulating layer and at least one stacked chip attached to the insulating layer and pins on the front surface, where the front surface of the stacked chip faces the front surface of the base chip; and a top insulating layer, stacked on the stacked chip layer farthest from the base chip layer. A vertical interconnection hole is formed inside the inter-chip insulating layer to allow the corresponding pins to be communicated vertically so as to be electrically connected. Inside the vertical interconnection hole, a conductive material layer is formed that makes the corresponding pins electrically connected; the stacked chip is thinned and reduced after being attached to the inter-chip insulating layer.
Public/Granted literature
- US20230178514A1 CHIP STACK PACKAGING STRUCTURE AND CHIP STACK PACKAGING METHOD Public/Granted day:2023-06-08
Information query
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