- Patent Title: Array substrate, method for fabricating same, and display device
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Application No.: US17048819Application Date: 2020-08-05
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Publication No.: US11869904B2Publication Date: 2024-01-09
- Inventor: Xiaobo Hu
- Applicant: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Applicant Address: CN Guangdong
- Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Guangdong
- Priority: CN 2010697170.5 2020.07.20
- International Application: PCT/CN2020/107079 2020.08.05
- International Announcement: WO2022/016618A 2022.01.27
- Date entered country: 2020-10-19
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L25/16 ; H01L23/00

Abstract:
An array substrate, a method for fabricating the same, and a display device are provided. The method includes: forming a passivation layer on an array substrate, wherein the array substrate includes a thin film transistor and a conductive pad, and the passivation layer covers the thin film transistor and the conductive pad; forming a full-surface carbon film on the passivation layer; and patterning the carbon film and the passivation layer to remove the passivation layer and the carbon film corresponding to the conductive pad by a patterning process to obtain the array substrate.
Public/Granted literature
- US20230163146A1 ARRAY SUBSTRATE, METHOD FOR FABRICATING SAME, AND DISPLAY DEVICE Public/Granted day:2023-05-25
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