Invention Grant
- Patent Title: In situ selective etching and selective regrowth of epitaxial layer for surface recombination velocity reduction in light emitting diodes
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Application No.: US17866452Application Date: 2022-07-15
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Publication No.: US11869922B2Publication Date: 2024-01-09
- Inventor: Anurag Tyagi , James Ronald Bonar , Gareth Valentine
- Applicant: Meta Platforms Technologies, LLC
- Applicant Address: US CA Menlo Park
- Assignee: META PLATFORMS TECHNOLOGIES, LLC
- Current Assignee: META PLATFORMS TECHNOLOGIES, LLC
- Current Assignee Address: US CA Menlo Park
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: H01L27/15
- IPC: H01L27/15

Abstract:
LED apparatuses and corresponding manufacturing techniques are described. In some examples, an LED apparatus includes a mesa etched from a layered epitaxial structure. The layered epitaxial structure includes a quantum well layer and a barrier layer adjacent to the quantum well layer. The barrier layer overhangs the quantum well layer as a result of the quantum well layer having been etched to a greater depth compared to the barrier layer. In some examples, the quantum well layer and the barrier layer are etched together to produce an area where the barrier layer overhangs the quantum well layer. Etching of the quantum well layer and the barrier layer can be performed after the layered epitaxial structure has been etched to form the mesa, in order to reduce surface imperfections leftover from the mesa etch. In some examples, one or more regrowth semiconductor layers are formed over etched facets of the mesa.
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