Invention Grant
- Patent Title: Method for forming semiconductor structure and semiconductor structure
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Application No.: US17370313Application Date: 2021-07-08
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Publication No.: US11869930B2Publication Date: 2024-01-09
- Inventor: Yong Lu
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Cooper Legal Group, LLC
- Priority: CN 2010181067.5 2020.03.16
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L21/3213 ; H10B12/00

Abstract:
A method for forming a semiconductor structure and a semiconductor structure are provided. The method includes: a stacked structure is formed on a surface of a substrate, the stacked structure including supporting layers and sacrificial layers which are alternately stacked; a buffer layer is formed on a surface of the stacked structure facing away from the substrate; capacitor holes penetrating through the stacked structure and the buffer layer and exposing capacitor contacts are formed; a first electrode layer covering inner walls of the capacitor holes is formed; an etching window penetrating through the buffer layer is formed; part of the supporting layers and all of the sacrificial layers in the stacked structure are removed along the etching window; the buffer layer is removed; and a dielectric layer and a second electrode layer are formed to form a capacitor.
Public/Granted literature
- US20210335993A1 METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR STRUCTURE Public/Granted day:2021-10-28
Information query
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