Invention Grant
- Patent Title: Manufacturing method of capacitive structure, and capacitor
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Application No.: US17467593Application Date: 2021-09-07
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Publication No.: US11869932B2Publication Date: 2024-01-09
- Inventor: Chaojun Sheng
- Applicant: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Applicant Address: CN Hefei
- Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
- Current Assignee Address: CN Hefei
- Agency: Cooper Legal Group, LLC
- Priority: CN 2010947809.0 2020.09.10
- Main IPC: H10B12/00
- IPC: H10B12/00 ; H01L49/02

Abstract:
A manufacturing method of a capacitive structure includes: providing a semiconductor base; forming a first mask layer on the semiconductor base, the first mask layer having a plurality of first round hole patterns distributed uniformly; forming first openings distributed uniformly on the semiconductor base by etching based on the first round hole patterns; forming a second mask layer on one side, away from the semiconductor base, of the first openings, and forming a plurality of second round hole patterns on the second mask layer; forming second openings distributed uniformly on the semiconductor base by etching based on the second round hole patterns, and meanwhile continuously etching the first openings; and etching the first openings and the second openings to form capacitive holes, and depositing a lower electrode layer, a dielectric layer and an upper electrode layer within the capacitive holes to form the capacitive structure.
Public/Granted literature
- US20220077280A1 MANUFACTURING METHOD OF CAPACITIVE STRUCTURE, AND CAPACITOR Public/Granted day:2022-03-10
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