Invention Grant
- Patent Title: Graphene-based TFT comprising nitrogen-doped graphene layer as active layer
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Application No.: US17428501Application Date: 2019-10-25
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Publication No.: US11869945B2Publication Date: 2024-01-09
- Inventor: Soon-Gil Yoon , Byeong-Ju Park , Yi-Re Han
- Applicant: The Industry & Academic Cooperation in Chungnam National University (IAC)
- Applicant Address: KR Daejeon
- Assignee: THE INDUSTRY & ACADEMIC COOPERATION IN CHUNGNAM NATIONAL UNIVERSITY (IAC)
- Current Assignee: THE INDUSTRY & ACADEMIC COOPERATION IN CHUNGNAM NATIONAL UNIVERSITY (IAC)
- Current Assignee Address: KR Daejeon
- Agency: Paratus Law Group, PLLC
- Priority: KR 20190019924 2019.02.20
- International Application: PCT/KR2019/014120 2019.10.25
- International Announcement: WO2020/171341A 2020.08.27
- Date entered country: 2021-08-04
- Main IPC: H01L29/167
- IPC: H01L29/167 ; H01L21/04 ; H01L29/16 ; H01L29/49 ; H01L29/66 ; H01L29/786

Abstract:
Disclosed is a high-quality and high-functional graphene-based TFT, including: a gate electrode, a gate insulating layer disposed on the gate electrode; an active layer including a nitrogen-doped graphene layer, on which disposed in a partial region of the gate insulating layer; a first electrode disposed on a region of one side of the active layer; and a second electrode disposed on a region of the other side of the active layer. The present invention allows obtaining the TFT having excellent characteristics by directly growing graphene on a Ti layer, implementing damages with remote plasma, and doping with nitrogen gas to fabricate a graphene active layer.
Public/Granted literature
- US20220109052A1 GRAPHENE-BASED TFT COMPRISING NITROGEN-DOPED GRAPHENE LAYER AS ACTIVE LAYER Public/Granted day:2022-04-07
Information query
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