Invention Grant
- Patent Title: Semiconductor laser, semiconductor laser array and method of manufacturing semiconductor laser
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Application No.: US15733990Application Date: 2018-09-26
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Publication No.: US11870213B2Publication Date: 2024-01-09
- Inventor: Yohei Hokama , Yosuke Suzuki
- Applicant: Mitsubishi Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- International Application: PCT/JP2018/035549 2018.09.26
- International Announcement: WO2020/065744A 2020.04.02
- Date entered country: 2020-12-01
- Main IPC: H01S5/026
- IPC: H01S5/026 ; H01S5/042 ; H01S5/125 ; H01S5/227 ; H01S5/12

Abstract:
A semiconductor laser in which a PD unit monitoring an optical output is integrated is provided. A semiconductor laser (100) includes: a DFB unit including a back surface side first cladding layer (3), a first diffraction grating layer (9), a light emitting layer (1) having a first MQW structure and emitting a laser beam, a front surface side first cladding layer (6), and a first contact layer (12) which are stacked; a DBR unit including a back surface side second cladding layer (4) having a resistivity higher than that of the back surface side first cladding layer (3), a second diffraction grating layer (10) reflecting part of the laser beam toward the DFB unit, a first core layer (2a) guiding a remnant of the laser beam and having an effective bandgap energy smaller than that of the first MQW structure, and a front surface side second cladding layer (7) having a resistivity higher than that of the front surface side first cladding layer (6) which are stacked; and a PD unit including a back surface side third cladding layer (5), a second core layer (2b) having a second MQW structure absorbing the remnant of the laser beam guided by the first core layer (2a), a front surface side third cladding layer (8), and a second contact layer (14) which are stacked.
Public/Granted literature
- US20210218220A1 SEMICONDUCTOR LASER, SEMICONDUCTOR LASER ARRAY AND METHOD OF MANUFACTURING SEMICONDUCTOR LASER Public/Granted day:2021-07-15
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