Invention Grant
- Patent Title: Two-stage lateral bulk acoustic wave filter
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Application No.: US17365902Application Date: 2021-07-01
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Publication No.: US11870408B2Publication Date: 2024-01-09
- Inventor: Markku Ylilammi , Tapani Makkonen , Tuomas Pensala
- Applicant: VTT Technical Research Centre of Finland Ltd
- Applicant Address: FI Espoo
- Assignee: VTT Technical Research Centre of Finland Ltd
- Current Assignee: VTT Technical Research Centre of Finland Ltd
- Current Assignee Address: FI Espoo
- Agency: Fish & Richardson P.C.
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/13 ; H03H9/17

Abstract:
Acoustic wave filter devices are disclosed. A device includes a layer providing or on a topmost layer of an acoustic reflector. The intermediary layer has a first region and a second region. The first region has a first layer thickness and the second region has a second layer thickness different from the first layer thickness. The device includes a first multilayer stack on the first region and a second multilayer stack on the second region of the intermediary layer. Each of the first and the second stacks includes a piezoelectric layer on a counter electrode that is located on the respective region, an input and an output electrode. Application of a radio frequency voltage between the input electrode and the counter electrode layer of the first stack creates acoustic resonance modes in the piezoelectric layer between the input and output electrodes of the first and the second stack.
Public/Granted literature
- US20210408996A1 TWO-STAGE LATERAL BULK ACOUSTIC WAVE FILTER Public/Granted day:2021-12-30
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