Invention Grant
- Patent Title: Film bulk acoustic resonator chip and package structure with improved temperature coefficient
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Application No.: US17158372Application Date: 2021-01-26
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Publication No.: US11870414B2Publication Date: 2024-01-09
- Inventor: Young Hun Kim
- Applicant: WISOL CO., LTD.
- Applicant Address: KR Osan-si
- Assignee: WISOL CO., LTD.
- Current Assignee: WISOL CO., LTD.
- Current Assignee Address: KR Osan-si
- Agency: LRK PATENT LAW FIRM
- Priority: KR 20200104684 2020.08.20
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/205 ; H03H9/17

Abstract:
A film bulk acoustic resonator (FBAR) chip and package structure with an improved temperature coefficient that is capable of being more stable with respect to surrounding temperature changes, without any decrease in performance of Q factor or k2e. The FBAR chip and package structure includes a plurality of FBARs located on a central area of one surface of a substrate and each having a bottom electrode, a piezoelectric material, and a top electrode; and a temperature compensation layer formed around the central area of one surface of the substrate.
Public/Granted literature
- US20220060169A1 FILM BULK ACOUSTIC RESONATOR CHIP AND PACKAGE STRUCTURE WITH IMPROVED TEMPERATURE COEFFICIENT Public/Granted day:2022-02-24
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