Invention Grant
- Patent Title: Surface acoustic wave resonator with suppressed transverse modes using second bus bar
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Application No.: US17076945Application Date: 2020-10-22
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Publication No.: US11870421B2Publication Date: 2024-01-09
- Inventor: Yuya Hiramatsu , Rei Goto , Yumi Torazawa
- Applicant: SKYWORKS SOLUTIONS, INC.
- Applicant Address: US CA Irvine
- Assignee: SKYWORKS SOLUTIONS, INC.
- Current Assignee: SKYWORKS SOLUTIONS, INC.
- Current Assignee Address: US CA Irvine
- Agency: Lando & Anastasi, LLP
- Main IPC: H03H9/25
- IPC: H03H9/25 ; H03H9/02 ; H03H9/72 ; H03H9/64 ; H03H9/145

Abstract:
Aspects of this disclosure relate to a surface acoustic wave resonator. The surface acoustic wave resonator includes a piezoelectric substrate, interdigital transducer electrodes disposed on an upper surface of the piezoelectric substrate, a dielectric temperature compensation layer disposed on the piezoelectric substrate to cover the interdigital transducer electrodes, and a dielectric passivation layer over the temperature compensation layer. The passivation layer may include an oxide layer configured to have a sound velocity greater than that of the temperature compensation layer to suppress a transverse signal transmission.
Public/Granted literature
- US20210126618A1 SURFACE ACOUSTIC WAVE RESONATOR WITH SUPPRESSED TRANSVERSE MODES USING SECOND BUS BAR Public/Granted day:2021-04-29
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