Invention Grant
- Patent Title: Three-dimensional memory device having source-select-gate cut structures and methods for forming the same
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Application No.: US17162861Application Date: 2021-01-29
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Publication No.: US11871573B2Publication Date: 2024-01-09
- Inventor: Zhong Zhang
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: BAYES PLLC
- Main IPC: H10B43/35
- IPC: H10B43/35 ; H01L23/522 ; H01L23/528 ; H10B41/27 ; H10B41/35 ; H10B43/27

Abstract:
A 3D memory device includes a memory stack including a memory block. The memory block includes a first memory array structure, a staircase structure, a second memory array structure in a first lateral direction, and a plurality of strings in a second lateral direction. The staircase structure includes a staircase zone and a bridge structure adjacent to the staircase zone. The 3D memory device also includes a SSG cut structure. The SSG cut structure includes a first portion between a first string and a second string and extends in the bridge structure in the first lateral direction. The staircase zone includes a first staircase conductively connected to first memory cells in the first string through the bridge structure and a second staircase conductively connected to second memory cells in the second string in the first memory array structure through the bridge structure.
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