Semiconductor memory device and method of manufacturing the same
Abstract:
A semiconductor memory device according to an embodiment includes: a first interlayer insulating layer and a second interlayer insulating layer that are arranged in a first direction; a gate electrode layer provided between the first interlayer insulating layer and the second interlayer insulating layer; a semiconductor layer extending in the first direction and facing the gate electrode layer in a second direction intersecting the first direction; a first insulating layer provided between the gate electrode layer and the semiconductor layer; a charge storage layer provided between the gate electrode layer and the first insulating layer and containing a metal element; a second insulating layer provided between the gate electrode layer and the charge storage layer; and a first region provided between the charge storage layer and the first insulating layer and containing manganese (Mn), silicon (Si), and oxygen (O).
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