- Patent Title: Semiconductor memory device and method of manufacturing the same
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Application No.: US17472094Application Date: 2021-09-10
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Publication No.: US11871574B2Publication Date: 2024-01-09
- Inventor: Atsushi Murakoshi , Tomoya Kawai
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP 21046802 2021.03.22
- Main IPC: H10B43/35
- IPC: H10B43/35 ; H10B43/10 ; H10B43/27

Abstract:
A semiconductor memory device according to an embodiment includes: a first interlayer insulating layer and a second interlayer insulating layer that are arranged in a first direction; a gate electrode layer provided between the first interlayer insulating layer and the second interlayer insulating layer; a semiconductor layer extending in the first direction and facing the gate electrode layer in a second direction intersecting the first direction; a first insulating layer provided between the gate electrode layer and the semiconductor layer; a charge storage layer provided between the gate electrode layer and the first insulating layer and containing a metal element; a second insulating layer provided between the gate electrode layer and the charge storage layer; and a first region provided between the charge storage layer and the first insulating layer and containing manganese (Mn), silicon (Si), and oxygen (O).
Public/Granted literature
- US20220302140A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2022-09-22
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