Invention Grant
- Patent Title: Thin film of metal oxide, organic electroluminescent device including thin film, photovoltaic cell including thin film, and manufacturing method of thin film
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Application No.: US17152142Application Date: 2021-01-19
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Publication No.: US11871590B2Publication Date: 2024-01-09
- Inventor: Hideo Hosono , Yoshitake Toda , Satoru Watanabe , Toshinari Watanabe , Kazuhiro Ito , Naomichi Miyakawa , Nobuhiro Nakamura
- Applicant: JAPAN SCIENCE AND TECHNOLOGY AGENCY
- Applicant Address: JP Kawaguchi
- Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY
- Current Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY
- Current Assignee Address: JP Kawaguchi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP 14190364 2014.09.18
- The original application number of the division: US16169078 2018.10.24
- Main IPC: H10K30/15
- IPC: H10K30/15 ; C23C14/08 ; C23C14/34 ; C23C14/35 ; H01L21/02 ; H01J37/34 ; H01L31/032 ; H10K50/16 ; H10K50/18 ; H10K50/17 ; H10K102/00 ; H10K102/10 ; H01L31/0256
Abstract:
A thin film of metal oxide includes zinc (Zn); tin (Sn); silicon (Si); and oxygen (O). In terms of oxide, based on 100 mol % of total of oxides of the thin film, SnO2 is greater than 15 mol % but less than or equal to 95 mol %.
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