• Patent Title: Semiconductor device including resistance changing layer and method of manufacturing the same
  • Application No.: US17391444
    Application Date: 2021-08-02
  • Publication No.: US11871684B2
    Publication Date: 2024-01-09
  • Inventor: Jae Hyun Han
  • Applicant: SK hynix Inc.
  • Applicant Address: KR Icheon-si
  • Assignee: SK hynix Inc.
  • Current Assignee: SK hynix Inc.
  • Current Assignee Address: KR Icheon-si
  • Priority: KR 20200144704 2020.11.02
  • Main IPC: H10N70/20
  • IPC: H10N70/20 H10N70/00
Semiconductor device including resistance changing layer and method of manufacturing the same
Abstract:
A semiconductor device includes a substrate and a gate structure disposed over the substrate. The gate structure includes at least one gate electrode layer and at least one interlayer insulating layer that are alternately stacked over the substrate. The semiconductor device includes a hole pattern penetrating the gate structure over the substrate, and a gate insulating layer, a channel layer, a resistor layer, and a resistance changing layer sequentially disposed on a sidewall surface of the gate structure within the hole pattern. Each of the resistor layer and the resistance changing layer is disposed opposite to the gate insulating layer, based on the channel layer.
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