Invention Grant
- Patent Title: Micro-machined ultrasonic transducer including a tunable helmoltz resonator
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Application No.: US17118443Application Date: 2020-12-10
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Publication No.: US11872591B2Publication Date: 2024-01-16
- Inventor: Silvia Adorno , Roberto Carminati
- Applicant: STMICROELECTRONICS S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT 2019000023943 2019.12.13
- Main IPC: B06B1/06
- IPC: B06B1/06 ; B06B1/02 ; G10K9/122

Abstract:
A micro-machined ultrasonic transducer is proposed. The micro-machined ultrasonic transducer includes a membrane element for transmitting/receiving ultrasonic waves, during the transmission/reception of ultrasonic waves the membrane element oscillating, about an equilibrium position, at a respective resonance frequency. The equilibrium position of the membrane element is variable according to a biasing electric signal applied to the membrane element. The micro-machined ultrasonic transducer further comprises a cap structure extending above the membrane element; the cap structure identifies, between it and the membrane element, a cavity whose volume is variable according to the equilibrium position of the membrane element. The cap structure comprises an opening for inputting/outputting the ultrasonic waves into/from the cavity. The cap structure and the membrane element act as tunable Helmholtz resonator, whereby the resonance frequency is variable according to the volume of the cavity.
Public/Granted literature
- US20210178430A1 MICRO-MACHINED ULTRASONIC TRANSDUCER INCLUDING A TUNABLE HELMOLTZ RESONATOR Public/Granted day:2021-06-17
Information query
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