Invention Grant
- Patent Title: Transversely-excited film bulk acoustic resonator with reduced spurious modes
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Application No.: US17200703Application Date: 2021-03-12
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Publication No.: US11881834B2Publication Date: 2024-01-23
- Inventor: Soumya Yandrapalli , Viktor Plesski , Julius Koskela , Ventsislav Yantchev , Patrick Turner
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: ArentFox Schiff LLP
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/04 ; H03H9/13 ; H03H9/17 ; H03H9/56 ; H03H3/02

Abstract:
Acoustic filters, resonators and methods of making acoustic filters are disclosed. An acoustic resonator device includes a substrate. A back surface of a piezoelectric plate is attached to the substrate, a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. A conductor pattern is formed on the front surface of the piezoelectric plate, the conductor pattern including an interdigital transducer (IDTs) with interleaved fingers of the IDT disposed on the diaphragm. A ratio of the mark of the interleaved fingers to the pitch of the interleaved fingers is greater than or equal to 0.2 and less than or equal to 0.3.
Public/Granted literature
- US11791794B2 Transversely-excited film bulk acoustic resonator with reduced spurious modes Public/Granted day:2023-10-17
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