Invention Grant
- Patent Title: Laser cleaning method and device for improving uniformity of laser cleaning surface
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Application No.: US17130486Application Date: 2020-12-22
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Publication No.: US11883859B2Publication Date: 2024-01-30
- Inventor: Xuechun Lin , Zhiyan Zhang , Haijun Yu , Houwang Zhu , Quansheng Zeng , Zhiyong Dong , Hao Liang , Wenhao Ma , Hongyang Wang
- Applicant: INSTITUTE OF SEMICONDUCTORS, CHINESE ACADEMY OF SCIENCES , CHANGSHA AERONAUTICAL VOCATIONAL AND TECHNICAL COLLEGE
- Applicant Address: CN Beijing
- Assignee: INSTITUTE OF SEMICONDUCTORS, CHINESE ACADEMY OF SCIENCES
- Current Assignee: INSTITUTE OF SEMICONDUCTORS, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Beijing
- Agency: Kelly, Holt & Christenson, PLLC
- Agent Christopher R: Christenson
- Priority: CN 1911353814.2 2019.12.24
- Main IPC: B23K26/082
- IPC: B23K26/082 ; B08B7/00 ; B23K26/073 ; B23K26/06

Abstract:
A laser cleaning method and device for improving uniformity of a laser cleaning surface are provided. The laser cleaning method includes: applying a peaked-top sine wave signal to a motor; controlling a galvanometer to swing in a reciprocated manner by the motor; shaping a laser beam emitted by a laser to a linear beam by the reciprocated swing of the galvanometer; and performing laser cleaning using the shaped linear beam.
Public/Granted literature
- US20210187565A1 LASER CLEANING METHOD AND DEVICE FOR IMPROVING UNIFORMITY OF LASER CLEANING SURFACE Public/Granted day:2021-06-24
Information query
IPC分类: