Invention Grant
- Patent Title: Composition for post-polishing to be used after primary polishing of silicon wafers
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Application No.: US18038252Application Date: 2022-10-06
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Publication No.: US11884844B2Publication Date: 2024-01-30
- Inventor: Hibiki Ishijima , Eiichiro Ishimizu
- Applicant: NISSAN CHEMICAL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP 21168563 2021.10.14
- International Application: PCT/JP2022/037451 2022.10.06
- International Announcement: WO2023/063213A 2023.04.20
- Date entered country: 2023-05-23
- Main IPC: C09G1/02
- IPC: C09G1/02

Abstract:
A polishing composition used in wafer polishing process for eliminating protrusion around laser mark, thereby achieving a flat polished surface, as well as a wafer polishing method using the polishing composition. A post-polishing composition for elimination of a laser mark remaining after polishing of silicon wafer with a primary polishing composition containing silica particles, water, and a basic compound, the post-polishing composition including silica particles, water, a tetraalkylammonium ion, and a water-soluble polymer, wherein the mass ratio of the tetraalkylammonium ion to SiO2 of the silica particles is 0.200 to 1.000:1; the mass ratio of SiO2 dissolved in the polishing composition to SiO2 of the silica particles is 0.100 to 1.500:1; and the mass ratio of the water-soluble polymer to SiO2 of the silica particles is 0.005 to 0.05:1. The silica particles have an average primary particle diameter of 1 nm to 100 nm.
Public/Granted literature
- US20230416569A1 COMPOSITION FOR POST-POLISHING TO BE USED AFTER PRIMARY POLISHING OF SILICON WAFERS Public/Granted day:2023-12-28
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