Invention Grant
- Patent Title: Producing a ribbon or wafer with regions of low oxygen concentration
-
Application No.: US17634176Application Date: 2020-08-09
-
Publication No.: US11885036B2Publication Date: 2024-01-30
- Inventor: Jesse S. Appel , Alison Greenlee , Nathan Stoddard , Peter Kellerman , Parthiv Daggolu , Alexander Martinez , Saeed Pirooz , Brandon Williard , Charles Bowen , Brian McMullen , David Morrell , Dawei Sun
- Applicant: Leading Edge Equipment Technologies, Inc.
- Applicant Address: US MA Wilmington
- Assignee: Leading Edge Equipment Technologies, Inc.
- Current Assignee: Leading Edge Equipment Technologies, Inc.
- Current Assignee Address: US MA Wilmington
- Agency: Hodgson Russ LLP
- International Application: PCT/US2020/045552 2020.08.09
- International Announcement: WO2021/030236A 2021.02.18
- Date entered country: 2022-02-09
- Main IPC: C30B29/64
- IPC: C30B29/64 ; C30B15/06 ; C30B29/06 ; H01L31/04

Abstract:
A ribbon is formed such that the ribbon floats on a melt using a cold initializer facing an exposed surface of the melt. The ribbon is single crystal silicon. The ribbon is pulled from the silicon melt at a low angle off the melt surface. The ribbon is formed at a same rate as the pulling. The ribbon is separated from the melt at a wall of the crucible where a stable meniscus forms. The ribbon has a thickness between a first surface and an opposite second surface from 50 μm to 5 mm. The ribbon includes a first region extending a first depth from the first surface. The first region has a reduced oxygen concentration relative to a bulk of the ribbon.
Public/Granted literature
- US20220316087A1 PRODUCING A RIBBON OR WAFER WITH REGIONS OF LOW OXYGEN CONCENTRATION Public/Granted day:2022-10-06
Information query
IPC分类: