• Patent Title: Radio-frequency plasma generating system and method for adjusting the same
  • Application No.: US17620455
    Application Date: 2020-06-17
  • Publication No.: US11885315B2
    Publication Date: 2024-01-30
  • Inventor: Stanislav DudinDmytro Rafalskyi
  • Applicant: THRUSTME
  • Applicant Address: FR Paris
  • Assignee: THRUSTME
  • Current Assignee: THRUSTME
  • Current Assignee Address: FR Paris
  • Agency: NIXON & VANDERHYE
  • Priority: EP 305781 2019.06.18
  • International Application: PCT/EP2020/066793 2020.06.17
  • International Announcement: WO2020/254425A 2020.12.24
  • Date entered country: 2021-12-17
  • Main IPC: F03H1/00
  • IPC: F03H1/00 H05H1/46 B64G1/40
Radio-frequency plasma generating system and method for adjusting the same
Abstract:
Disclosed is a radio-frequency plasma generating system including a radio-frequency generator and a plasma source, the radio-frequency generator being inductively or capacitively coupled to the plasma source through a resonant electric circuit, the radio-frequency generator being adapted to receive direct current power from a direct current power supply and for generating radio-frequency power at a frequency f, the radio-frequency power including a reactive radio-frequency power oscillating in the resonant electric circuit and an active radio-frequency power absorbed by the plasma. The radio-frequency plasma generating system includes a unit for measuring an efficiency of conversion E of direct-current power to active radio-frequency power absorbed by the plasma and a unit for adjusting the frequency f as a function of the measured efficiency of conversion E to maintain the efficiency of conversion E in a predetermined range within a RF plasma operational range.
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