Invention Grant
- Patent Title: Radio-frequency plasma generating system and method for adjusting the same
-
Application No.: US17620455Application Date: 2020-06-17
-
Publication No.: US11885315B2Publication Date: 2024-01-30
- Inventor: Stanislav Dudin , Dmytro Rafalskyi
- Applicant: THRUSTME
- Applicant Address: FR Paris
- Assignee: THRUSTME
- Current Assignee: THRUSTME
- Current Assignee Address: FR Paris
- Agency: NIXON & VANDERHYE
- Priority: EP 305781 2019.06.18
- International Application: PCT/EP2020/066793 2020.06.17
- International Announcement: WO2020/254425A 2020.12.24
- Date entered country: 2021-12-17
- Main IPC: F03H1/00
- IPC: F03H1/00 ; H05H1/46 ; B64G1/40

Abstract:
Disclosed is a radio-frequency plasma generating system including a radio-frequency generator and a plasma source, the radio-frequency generator being inductively or capacitively coupled to the plasma source through a resonant electric circuit, the radio-frequency generator being adapted to receive direct current power from a direct current power supply and for generating radio-frequency power at a frequency f, the radio-frequency power including a reactive radio-frequency power oscillating in the resonant electric circuit and an active radio-frequency power absorbed by the plasma. The radio-frequency plasma generating system includes a unit for measuring an efficiency of conversion E of direct-current power to active radio-frequency power absorbed by the plasma and a unit for adjusting the frequency f as a function of the measured efficiency of conversion E to maintain the efficiency of conversion E in a predetermined range within a RF plasma operational range.
Public/Granted literature
- US20220341405A1 RADIO-FREQUENCY PLASMA GENERATING SYSTEM AND METHOD FOR ADJUSTING THE SAME Public/Granted day:2022-10-27
Information query