Invention Grant
- Patent Title: Device for interferometric distance measurement
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Application No.: US17673976Application Date: 2022-02-17
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Publication No.: US11885607B2Publication Date: 2024-01-30
- Inventor: Herbert Huber-Lenk
- Applicant: DR. JOHANNES HEIDENHAIN GmbH
- Applicant Address: DE Traunreut
- Assignee: DR. JOHANNES HEIDENHAIN GMBH
- Current Assignee: DR. JOHANNES HEIDENHAIN GMBH
- Current Assignee Address: DE Traunreut
- Agency: Carter, DeLuca & Farrell LLP
- Priority: DE 2021201722.3 2021.02.24
- Main IPC: G01B9/02061
- IPC: G01B9/02061 ; G01B11/02 ; G01B9/02055

Abstract:
An interferometric distance-measurement device includes a multi-wavelength light source which provides a beam having at least three different wavelengths. An interferometer unit splits the beam into measuring and reference beams. The measuring beam propagates in the direction of a measuring reflector movable along a measuring axis and undergoes a back-reflection, and the reference beam propagates in the direction of a stationary reference reflector and undergoes a back-reflection. The back-reflected measuring and reference beams interfere with each other in an interference beam. A detection unit splits the interference beam such that several phase-shifted partial interference signals result for each wavelength. A signal processing unit determines absolute position information regarding the measuring reflector from the partial interference signals of different wavelengths and an additional coarse position signal.
Public/Granted literature
- US20220276040A1 DEVICE FOR INTERFEROMETRIC DISTANCE MEASUREMENT Public/Granted day:2022-09-01
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