Device for interferometric distance measurement
Abstract:
An interferometric distance-measurement device includes a multi-wavelength light source which provides a beam having at least three different wavelengths. An interferometer unit splits the beam into measuring and reference beams. The measuring beam propagates in the direction of a measuring reflector movable along a measuring axis and undergoes a back-reflection, and the reference beam propagates in the direction of a stationary reference reflector and undergoes a back-reflection. The back-reflected measuring and reference beams interfere with each other in an interference beam. A detection unit splits the interference beam such that several phase-shifted partial interference signals result for each wavelength. A signal processing unit determines absolute position information regarding the measuring reflector from the partial interference signals of different wavelengths and an additional coarse position signal.
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