Invention Grant
- Patent Title: Detection device, processing device, equipment, detection method, and detection program
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Application No.: US18104991Application Date: 2023-02-02
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Publication No.: US11885611B2Publication Date: 2024-01-30
- Inventor: Yoshihiro Nakagawa , Taro Matsuo
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP 17231128 2017.11.30
- Main IPC: G01B11/245
- IPC: G01B11/245 ; G06T7/50 ; G01B11/22 ; G01B11/24 ; G06V10/143 ; G06V40/20

Abstract:
A detection device includes: a first detector which irradiates light onto the target object and detects light emitted from the target object; a first shape information generator which generates first shape information representing a first shape of the target object on the basis of a detection result of the first detector; and a second shape information generator which adds a second shape, which is based on information different from the detection result of the first detector, to the first shape, and which generates second shape information representing a shape including the first shape and the second shape.
Public/Granted literature
- US20230194246A1 DETECTION DEVICE, PROCESSING DEVICE, EQUIPMENT, DETECTION METHOD, AND DETECTION PROGRAM Public/Granted day:2023-06-22
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