Invention Grant
- Patent Title: Methods including panel bonding acts and electronic devices including cavities
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Application No.: US17993024Application Date: 2022-11-23
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Publication No.: US11885736B2Publication Date: 2024-01-30
- Inventor: Horst Theuss
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Dicke, Billig & Czaja, PLLC
- Priority: DE 2019102836.1 2019.02.05
- Main IPC: G01N21/17
- IPC: G01N21/17 ; G01N29/24 ; G01R33/028 ; B81C1/00

Abstract:
A method is disclosed. In one example, the method includes bonding a first panel of a first material to a base panel in a first gas atmosphere, wherein multiple hermetically sealed first cavities encapsulating gas of the first gas atmosphere are formed between the first panel and the base panel. The method further includes bonding a second panel of a second material to at least one of the base panel and the first panel, wherein multiple second cavities are formed between the second panel and the at least one of the base panel and the first panel.
Public/Granted literature
- US11921032B2 Methods including panel bonding acts and electronic devices including cavities Public/Granted day:2024-03-05
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