Invention Grant
- Patent Title: Tolerance error estimating apparatus, method, program, reconstruction apparatus and control apparatus
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Application No.: US17703041Application Date: 2022-03-24
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Publication No.: US11885754B2Publication Date: 2024-01-30
- Inventor: Takumi Ota
- Applicant: Rigaku Corporation
- Applicant Address: JP Tokyo
- Assignee: Rigaku Corporation
- Current Assignee: Rigaku Corporation
- Current Assignee Address: JP Tokyo
- Agency: ASLAN LAW, P.C.
- Priority: JP 21053075 2021.03.26
- Main IPC: G06T11/00
- IPC: G06T11/00 ; G01N23/046 ; G01N23/083

Abstract:
A tolerance error estimating apparatus, method, program, reconstruction apparatus and control apparatus capable of estimating a deviation of a drive axis from a reference position with respect to driving time are provided. A tolerance error estimating apparatus (processing apparatus 300) X-ray analysis apparatus comprises a specific position calculating section 320 for obtaining a specific position of a reference sample at each rotation driving time from X-ray detection images and a deviation amount calculating section 330 for calculating the deviation amount Δx in the x direction and Δy in the y direction of the center position of a rotation drive shaft as the rotation drive axis at each rotation driving time from the reference position based on the specific position, when the z direction of the orthogonal coordinate system fixed to the sample is set the direction parallel to the rotation drive axis.
Public/Granted literature
- US20220307994A1 TOLERANCE ERROR ESTIMATING APPARATUS, METHOD, PROGRAM, RECONSTRUCTION APPARATUS AND CONTROL APPARATUS Public/Granted day:2022-09-29
Information query
IPC分类:
G | 物理 |
G06 | 计算;推算或计数 |
G06T | 一般的图像数据处理或产生 |
G06T11/00 | 2D〔二维〕图像的生成 |