Invention Grant
- Patent Title: Sensor device
-
Application No.: US17999868Application Date: 2021-04-20
-
Publication No.: US11885912B2Publication Date: 2024-01-30
- Inventor: Yusuke Takatsuka , Yoshiki Ebiko
- Applicant: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: CHIP LAW GROUP
- Priority: JP 20098996 2020.06.07
- International Application: PCT/JP2021/016040 2021.04.20
- International Announcement: WO2021/251006A 2021.12.16
- Date entered country: 2022-11-25
- Main IPC: G01S7/48
- IPC: G01S7/48 ; G01S7/481 ; G01S17/32 ; G01S7/4915

Abstract:
A sensor device according to the present technology includes a pixel that includes: a photoelectric conversion element that performs photoelectric conversion; a first charge holding unit and a second charge holding unit that hold charges accumulated in the photoelectric conversion element; a first transfer transistor that transfers the charges to the first charge holding unit; and a second transfer transistor that transfers the charges to the second charge holding unit. Each of the first and second transfer transistors includes a vertical transistor including a vertical gate electrode portion, and in each of the first and second transfer transistors, an oxide film thickness of an opposite side wall portion is made larger than an oxide film thickness of a transfer side wall portion, the opposite side wall portion being positioned on a side opposite to the transfer side wall portion that is a wall portion on a side facing a transfer path of the charges among side wall portions of the vertical gate electrode portion.
Public/Granted literature
- US20230350028A1 SENSOR DEVICE Public/Granted day:2023-11-02
Information query