- Patent Title: Material for forming organic film, substrate for manufacturing semiconductor device, method for forming organic film, patterning process, and compound for forming organic film
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Application No.: US17181776Application Date: 2021-02-22
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Publication No.: US11886118B2Publication Date: 2024-01-30
- Inventor: Daisuke Kori , Takashi Sawamura , Keisuke Niida , Seiichiro Tachibana
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP 20051740 2020.03.23
- Main IPC: G03F7/11
- IPC: G03F7/11 ; C09D7/20 ; C08F138/00 ; C09D4/00 ; C09D149/00 ; G03F7/09 ; H01L21/027 ; H01L21/768

Abstract:
A material for forming an organic film, including: a compound for forming an organic film shown by the following general formula (1A); and an organic solvent, where W1 represents a tetravalent organic group, n1 an integer of 0 or 1, n2 an integer of 1 to 3, and R1 an alkynyl group having 2 to 10 carbon atoms. A compound for forming an organic film is cured not only under air, but also under film formation conditions of inert gas, and forms an organic film having not only excellent heat resistance and properties of filling and planarizing a pattern formed on a substrate, but also favorable adhesion to a substrate, and a material for forming an organic film containing the compound, and a substrate for manufacturing a semiconductor device using the material, a method for forming an organic film using the material, and a patterning process using the material.
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