Invention Grant
- Patent Title: Simultaneous electrodes for magneto-resistive random access memory devices
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Application No.: US17806594Application Date: 2022-06-13
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Publication No.: US11887641B2Publication Date: 2024-01-30
- Inventor: Oscar van der Straten , Koichi Motoyama , Chih-Chao Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Michael A. Petrocelli
- Main IPC: G11C11/16
- IPC: G11C11/16 ; H10B61/00 ; H10N50/01 ; H10N50/10 ; H10N50/80 ; H10N50/85

Abstract:
A memory device includes a magnetic tunnel junction (MTJ) pillar between a top electrode and a bottom electrode. An amorphous dielectric hardmask is in contact with a first portion of an uppermost surface of the MTJ pillar. A first portion of a metal layer is disposed on opposite sidewalls of the amorphous dielectric hardmask and in contact with a second portion of the uppermost surface of the MTJ pillar extending outwards from the amorphous dielectric hardmask for providing the top electrode. A dielectric underlayer is in contact with a first portion of a bottommost surface of the MTJ pillar, while a second portion of the metal layer is disposed on opposite sidewalls of the dielectric underlayer. The second portion of the metal layer is in contact with a second portion of the bottommost surface of the MTJ pillar extending outwards from the dielectric underlayer for providing the bottom electrode.
Public/Granted literature
- US20230402078A1 SIMULTANEOUS ELECTRODES FOR MAGNETO-RESISTIVE RANDOM ACCESS MEMORY DEVICES Public/Granted day:2023-12-14
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