Invention Grant
- Patent Title: Filament-less electron source
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Application No.: US17491039Application Date: 2021-09-30
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Publication No.: US11887805B2Publication Date: 2024-01-30
- Inventor: John Stiller , Aaron Torok , Kevin Kagarice
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Klarquist Sparkman, LLP
- Main IPC: H01J37/075
- IPC: H01J37/075 ; H01J37/21 ; H01J37/073

Abstract:
Electron sources can include an electron source crystal coupled in series between opposing electrically conductive supports to form an electrically conductive path, wherein the electrical resistance of each of the electrically conductive supports is lower than the electrical resistance of the electron source crystal. Electron source crystals can include an emitting end and opposing shank end, wherein the shank end includes opposing leg portions. Electrically conductive supports can include foil supports spaced apart across a gap, wherein each of the opposing leg portions is attached to a respective foil support such that the foil supports are electrically connected to form the electrically conductive path. Particle focusing system are also disclosed. Electron sources can include an electron source crystal having an emitting end and opposing shank end, wherein the shank end is formed of a pair of opposing leg portions. Methods of manufacturing and operating electron sources are also disclosed.
Public/Granted literature
- US20230101787A1 FILAMENT-LESS ELECTRON SOURCE Public/Granted day:2023-03-30
Information query
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