Invention Grant
- Patent Title: Bias supply with a single controlled switch
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Application No.: US16926876Application Date: 2020-07-13
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Publication No.: US11887812B2Publication Date: 2024-01-30
- Inventor: Hien Minh Nguyen , Gideon Van Zyl
- Applicant: Advanced Energy Industries, Inc.
- Applicant Address: US CO Fort Collins
- Assignee: Advanced Energy Industries, Inc.
- Current Assignee: Advanced Energy Industries, Inc.
- Current Assignee Address: US CO Denver
- Agency: Neugeboren O'Dowd PC
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/67

Abstract:
Bias supplies, plasma processing systems, and associated methods are disclosed. One bias supply comprises a first inductor coupled between a first node of a switch and an output node where a first node of a second inductor is coupled to one of the output node or the first node of the switch. A voltage source is coupled between a second node of the switch and a second node of the second inductor. A connection is made between the return node and one of the second node of the switch and the second node of the second inductor. The bias supply also comprises a controller configured to cause an application of the periodic voltage between the output node and the return node by repeatedly closing the switch so current through the switch completes a full cycle.
Public/Granted literature
- US20210013006A1 BIAS SUPPLY WITH A SINGLE CONTROLLED SWITCH Public/Granted day:2021-01-14
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