A method of manufacturing a semiconductor device comprises: forming a doped region having a first conductive type in a semiconductor substrate, and forming a gate structure on the doped region; implanting doping ions having a second conductive type to a second region of the doped region along a vertical direction, so as to form a source/drain region having the second conductive type; implanting doping ions having the first conductive type to a first region of the doped region along a tilt direction inclining toward the gate structure, and then annealing, so as to form a Halo region extending to the gate structure from the source/drain region, wherein the first region is adjacent to the gate structure and the second region is located on the side of the first region facing away from the gate structure, and the first region and the second region have no overlap region.